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NANO-PROX

Title
Nano-Scale Protective Oxide Films for Semiconductor Applications & Beyond
Funding
EC | FP7 | SP3 | PEOPLE
Call
FP7-PEOPLE-2009-RG
Contract (GA) number
256348
Start Date
2010/04/01
End Date
2014/03/31
Open Access mandate
no
Special Clause 39
no
Organizations
OZYEGIN UNIVERSITY OZUN
More information
Detailed project information (CORDIS)

 

  • Controlling germanium CMP selectivity through slurry mediation by surface active agents

    Due to copyright restrictions, the access to the full text of this article is only available via subscription. New developments and device performance requirements in microelectronics industry add to the challenges in chemical mechanical planarization (CMP) process. One of the recently introduced materials to semiconductor manufacturing is germanium which enables improved device performance through better channel mobility in shallow trench isolation (STI) applications for advanced circuits...

    Characterization of nano-scale protective oxide films: application on metal chemical mechanical planarization

    This study focuses on the characterization of nano-scale metal oxide films for chemical mechanical planarization (CMP) applications. The protective nature of the self-grown metal oxide layers in the CMP slurry environment enable topographic selectivity required for metallization of interconnects. Tungsten was selected as the model metal film to study the formation and characteristics of the metal oxide nano-layers since tungsten CMP is very well-established in conventional semiconductor manuf...

    Improving selectivity on germanium CMP applications

    Due to copyright restrictions, the access to the full text of this article is only available via subscription. In the presented paper, the adsorption characteristics of cationic and anionic surfactants on germanium and silica were studied in order to improve selectivity in germanium based shallow trench isolation chemical mechanical planarization applications. It was observed that the very strong or loose self-assembled surfactant structures can help obtain selectivity on the silica/german...

    Evaluation of infection resistance of biological implants through CMP based micro-patterning

    Due to copyright restrictions, the access to the full text of this article is only available via subscription. Biomaterials are widely used for dental implants, orthopedic devices, cardiac pacemakers and catheters. One of the main concerns on using bio-implants is the risk of infection on the materials used. In this study, our aim is to quantify the effect of controlled surface roughness on the infection resistance of the titanium based bio-materials which are commonly used for orthopedic ...

    Application of chemical mechanical polishing process on titanium based implants

    Due to copyright restrictions, the access to the full text of this article is only available via subscription. Modification of the implantable biomaterial surfaces is known to improve the biocompatibility of metallic implants. Particularly, treatments such as etching, sand-blasting or laser treatment are commonly studied to understand the impact of nano/micro roughness on cell attachment. Although, the currently utilized surface modification techniques are known to improve the amount of ce...
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