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Hoffmann, Romy; Schreiter, Matthias; Heitmann, Johannes (2017)
Languages: English
Types: Article
Carbon dioxide (CO2) is a gas that well represents air quality in indoor environments as well as being an important greenhouse gas. However, the reliable and affordable sensing of environmental CO2 at room temperature, with techniques other than optical spectroscopy, remains an unsolved problem to this day. One major challenge for solid state sensors is the realisation of adequate selectivity, especially towards changing humidity. The thin film bulk acoustic resonator (FBAR) is a MEMS (Microelectromechanical systems) device that can not only detect gas-induced mass changes but also changes in the acoustic velocity and density of its layers. This multi-sensing provides a suitable platform for selective gas sensing. In this work we present studies done on polyaminosiloxane- and ethyl cellulose-functionalised FBARs regarding CO2 sensitivity, selectivity towards humidity, and stability. We demonstrate how CO2 and humidity signals can be separated and that CO2 can be sensed with a resolution of 50 ppm between 400 and 1000 ppm. Using the Mason model, we show how the acoustic velocity and density of an absorption layer can be determined and how changes in those parameters affect the resonance frequency shift. The understanding of these results ultimately presents a tool to theoretically separate any number of gas analytes.
  • The results below are discovered through our pilot algorithms. Let us know how we are doing!

    • Apte, M. G.: A Review of Demand Control Ventilation, LBNL60170 Report, Lawrence Berkeley National Laboratory, Berkeley, CA, USA, 2006.
    • Bollini, P., Didas, S. A., and Jones, C. W.: Amine-oxide hybrid materials for acid gas separations, J. Mater. Chem., 21, 15100- 15120, doi:10.1039/C1JM12522B, 2011.
    • Chao, C. Y. H. and Hu, J. S.: Development of a dual-mode demand control ventilation strategy for indoor air quality control and energy saving, Build. Environ., 39, 385-397, doi:10.1016/j.buildenv.2003.11.001, 2004.
    • Choi, S., Drese, J. H., and Jones, C. W.: Adsorbent materials for carbon dioxide capture from large anthropogenic point sources, ChemSusChem, 2, 796-854, doi:10.1002/cssc.200900036, 2009.
    • Haeusler, A. and Meyer, J. U.: A novel thick film conductive type CO2 sensor, Sensor. Actuat. B-Chem., 34, 388-395, doi:10.1016/S0925-4005(96)01847-3, 1996.
    • Kajtár, L., Herczeg, L., Láng, E., Hrustinszky, T., and Bánhidi, L.: Influence of carbon-dioxide pollutant on human well-being and work intensity, Proceedings of Healthy Buildings, 6, 85-90, 2006.
    • Kaneyasu, K., Otsuka, K., Setoguchi, Y., Sonoda, S., Nakahara, T., Aso, I., and Nakagaichi, N.: A carbon dioxide gas sensor based on solid electrolyte for air quality control, Sensor. Actuat. BChem., 66, 56-58, doi:10.1016/S0925-4005(99)00411-6, 2000.
    • Khatri, R. A., Chuang, S. S., Soong, Y., and Gray, M.: Thermal and chemical stability of regenerable solid amine sorbent for CO2 capture, Energ. Fuel., 20, 1514-1520, doi:10.1021/ef050402y, 2006.
    • Link, M.: Study and realization of shear wave mode solidly mounted film bulk acoustic resonators (FBAR) made of c-axis inclined zinc oxide (ZnO) thin films: application as gravimetric sensors in liquid environments, Doctoral Dissertation, Université Henri Poincaré, Nancy I, France, 2006.
    • Pandey, S. K. and Kim, K. H.: The relative performance of NDIRbased sensors in the near real-time analysis of CO2 in air, Sensors, 7, 1683-1696, doi:10.3390/s7091683, 2007.
    • Sadaoka, Y.: NASICON based CO2 gas sensor with an auxiliary electrode composed of LiCO3-metal oxide mixtures, Sensor. Actuat. B-Chem., 121, 194-199, doi:10.1016/j.snb.2006.09.019, 2007.
    • Sayari, A. and Belmabkhout, Y.: Stabilization of amine-containing CO2 adsorbents: dramatic effect of water vapour, J. Am. Chem. Soc., 132, 6312-6314, doi:10.1021/ja1013773, 2010.
    • Weber, J., Albers, W. M., Tuppurainen, J., Link, M., Gabl, R., Wersing, W., and Schreiter, M.: Shear mode FBARs as highly sensitive liquid biosensors, Sensor. Actuat. A-Phys., 128, 84-88, doi:10.1016/j.sna.2006.01.005, 2006.
    • Wingqvist, G.: AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications - a review, Surf. Coat. Tech., 205, 1279-1286, doi:10.1016/j.surfcoat.2010.08.109, 2010.
    • Wong, J. Y.: Self-calibrating carbon dioxide analyzer, Google Patents, US4578762 A, 1983.
    • Yamazoe, N. and Miura, N.: Environmental gas sensing, Sensor. Actuat. B-Chem., 20, 95-102, doi:10.1016/0925- 4005(93)01183-5, 1994.
    • Yu, T., Wakuda, K., Blair, D. L., and Weiss, R. G.: Reversibly Cross-Linking Amino-Polysiloxanes by Simple Triatomic Molecules. Facile Methods for Tuning Thermal, Rheological, and Adhesive Properties, J. Phys. Chem. C, 113, 11546- 11553, doi:10.1021/jp900115g, 2009.
    • Zhou, R., Vaihinger, S., Geckeler, K. E., and Göpel, W.: Reliable CO2 sensors with silicon-based polymers on quartz microbalance transducers, Sensor. Actuat. B-Chem., 19, 415-420, doi:10.1016/0925-4005(93)01018-Y, 1994.
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