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Moldovan, Grigore; Harrison, Ian; Roe, Martin; Brown, Paul D. (2004)
Publisher: Institute of Physics Publishing
Languages: English
Types: Part of book or chapter of book
Subjects:
A correlated current-voltage (I-V), electron beam induced conductivity (EBIC) and X-ray photoelectron spectroscopy (XPS) study of Au contacts to KOH treated n-type GaN is presented. A strong degradation of I-V characteristics occurs following the KOH treatment, mirrored in a reduction in the magnitude of the EBIC current, even though the EBIC images look visibly unaltered. XPS demonstrates a modification in the surfaces states, e.g. resulting in a –0.3eV shift in the binding energy of Ga3d for MBE GaN following KOH processing.
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    • [1] Pearton S J, Ren F, Zhang A P and Lee K P 2000 Mat. Sci. Eng. R30 55-212 [2] Ping A T, Chen Q, Yang J W, Asif Khan M and Adesida I 1998 J. Electron Mat. 27 4 261-265 [3] Ping A T, Schmitz A C, Adesida I, Asif M, Chen Q and Yang J W 1997 J. Electron Mat. 26 3 266-271 [4] Moldovan G, Harrison I, Humphreys C J, Kappers M and Brown P D 2003 Mat. Sci. Eng., in press [5] Moldovan G, Harrison I and Brown P D 2003 Inst. Phys. Conf. Ser., in press [6] Li D, Sumiya M, Fuke S, Yang D, Que D, Suzuki Y and Fukuda Y 2001 J. Appl. Phys. 90 4219-4223 [7] Rickert K, Ellis A B, Himpsel F J, Sun J and Kuech T F 2002 Appl. Phys. Lett. 80 2 204-206
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