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Publisher: Elsevier
Languages: English
Types: Article
Subjects: Q

Classified by OpenAIRE into

mesheuropmc: inorganic chemicals
The atomic scale structure of amorphous hydrogenated carbon (a-C:H) films prepared from an acetylene precursor by plasma enhanced chemical vapour deposition (PECVD) and a fast-atom source (FAS) have been studied by neutron and X-ray diffraction. The effect of beam energy on the structure of the film is investigated, and comparison is made to samples prepared using at fast atom (neutral particle) source, also using acetylene as the precursor, The results show that, in both deposition methods, increasing the beam energy produces a lower total sp(2) hybridised carbon content in the film with evidence for a shift from pure olefinic to some aromatic/graphitic bonding in the FAS samples. The high resolution real-space neutron diffraction data allows a direct determination of the single:double bond ratio, and also shows the presence of sp(1) hybridised carbon bonding environments.
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