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Hassan, Mothana A.; Martin, Haydn; Jiang, Xiang (2015)
Publisher: EUSPEN
Languages: English
Types: Part of book or chapter of book
Subjects: Q1, QC
Single-shot inspection at nanoscale resolution is a problematic challenge for providing on-line inspection of manufacturing techniques such as roll-to-roll processes where the measurand is constantly moving. An example of such a measurement challenge is defect detection on vapor barrier films formed by depositing an aluminum oxide layer several tens of nanometres thick on a flexible polymer substrate. Effective detection and characterisation of defects in this layer requires a single-shot approach with nanometre scale vertical resolution.\ud This paper describes a line-scanning interferometer where a short coherence light source having a 25 nm linewidth source is spatially dispersed across the measurand thus encoding spatial position along a profile by wavelength. Phase shift interferometry (PSI) can be used to decode phase and thus height information, but requires multiple image captures. In order to realise single-shot measurement which is more suitable for online applications, a Fourier transform profilometry (FTP) approach is necessary. This paper explores the implementation of the FTP approach and presents a comparison of the measurement capability of FTP with the previously reported PSI method.
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    • [1] Kitagawa, K. (2012a). Single-shot interferometry without carrier fringe introduction. SPIE, 10.1117/2.1201207.004360
    • [2] Malacara, D. (2007). Optical shop testing ( 2nd ed.). New York: John Wiley & Sons
    • [3] Hassan, M. A., Martin, H., & Jiang, X. (2014). “Surface profile measurement using spatially dispersed short coherence interferometry.” Surface Topography: Metrology and Properties, 2(2), 024001
    • [4] Kazuyoshi Itoh, “Analysis of phase unwrapping algorithm,”Appl. Opt.21, 2470(1982)
    • [5] Xangqian Jiang, K. W., Feng Gao, and Hussam Muhamedsalih. (2010) “Fast surface measurement using wavelength scanning interferometry with compensation of environmental noise.” Optical Society of America
    • [6] Claudiu L Giusca, Richard K Leach, & Frank Helery. (2012). “Calibration of the scales of areal surface topography measuring instruments”: part 2. Amplification, linearity and squareness.Measurement Science and Technology, 23(6), 065005
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