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Kozin A. A.; Kozina Yu. Yu. (2012)
Publisher: Politehperiodika
Journal: Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Languages: English
Types: Article
Subjects: photomask, artificial intelligence system, technical diagnostics, fiducial marks, Electrical engineering. Electronics. Nuclear engineering, TK1-9971
The developed artificial intelligence system has a high level of noise immunity, so its inclusion in the hardware and software for technical diagnostics of photomasks will reduce the hardware requirements for its execution, and thereby reduce the cost of the complex. As a result it will allow to make a small-scale production profitable.
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